The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 11, 2018

Filed:

Sep. 10, 2015
Applicants:

National University Corporation Nagoya University, Nagoya-shi, Aichi, JP;

Central Glass Co., Ltd., Ube-shi, Yamaguchi, JP;

Inventors:

Toru Ujihara, Nagoya, JP;

Shunta Harada, Nagoya, JP;

Daiki Koike, Nagoya, JP;

Tomonori Umezaki, Ube, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C30B 19/10 (2006.01); C30B 19/12 (2006.01); C30B 29/36 (2006.01); C30B 19/06 (2006.01); C23C 14/06 (2006.01); H01L 21/02 (2006.01); C30B 9/06 (2006.01); C30B 15/30 (2006.01);
U.S. Cl.
CPC ...
C30B 19/10 (2013.01); C30B 19/062 (2013.01); C30B 19/068 (2013.01); C30B 19/12 (2013.01); C30B 29/36 (2013.01); C23C 14/0635 (2013.01); C30B 9/06 (2013.01); C30B 15/30 (2013.01); H01L 21/02378 (2013.01); H01L 21/02433 (2013.01);
Abstract

Provided is a method that allows growing a single crystal of silicon carbide on an off-substrate of silicon carbide while suppressing surface roughening. The method for producing a crystal of silicon carbide includes rotating a seed crystal of silicon carbide while bringing the seed crystal into contact with a starting material solution containing silicon and carbon. A crystal growth surface of the seed crystal has an off-angle, and the position of a rotation center of the seed crystal lies downstream of the central position of the seed crystal in a step flow direction that is a formation direction of the off-angle.


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