The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2018
Filed:
Jun. 27, 2016
Applicant:
Cardinal CG Company, Eden Prairie, MN (US);
Inventor:
Klaus H. W. Hartig, Avoca, WI (US);
Assignee:
CARDINAL CG COMPANY, Eden Prairie, MN (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 14/34 (2006.01); H01J 37/34 (2006.01); C23C 14/35 (2006.01);
U.S. Cl.
CPC ...
C23C 14/3407 (2013.01); C23C 14/35 (2013.01); C23C 14/351 (2013.01); H01J 37/345 (2013.01); H01J 37/3405 (2013.01); H01J 37/347 (2013.01); H01J 37/3414 (2013.01); H01J 37/3435 (2013.01); H01J 37/3452 (2013.01); H01J 37/3455 (2013.01); H01J 37/3461 (2013.01); H01J 2237/002 (2013.01);
Abstract
The invention provides a sputter deposition assembly that includes a sputtering chamber, a sputtering target, and a magnet assembly. The magnet assembly includes a two-part magnetic backing plate that includes first and second plate segments, of which at least one is laterally adjustable. Also provided are methods of operating the sputter deposition assembly.