The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 11, 2018

Filed:

Feb. 11, 2016
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Nobuo Hamamoto, Suwon-si, KR;

Miyazaki Hiroshi, Hwaseong-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05B 12/20 (2018.01); B05B 5/025 (2006.01); B05B 5/08 (2006.01); B05B 5/053 (2006.01); B05C 21/00 (2006.01); H01L 51/56 (2006.01); B05D 1/32 (2006.01); C23C 14/04 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
B05B 12/20 (2018.02); B05B 5/0255 (2013.01); B05B 5/0533 (2013.01); B05B 5/0536 (2013.01); B05B 5/087 (2013.01); B05C 21/005 (2013.01); B05D 1/32 (2013.01); C23C 14/042 (2013.01); H01L 51/0003 (2013.01); H01L 51/56 (2013.01);
Abstract

A thin film fabricating apparatus includes an electrode part which sprays a thin film material as electrified spray particles, a substrate holder disposed facing the electrode part and holding a substrate to be provided with a thin film, and a mask disposed between the electrode part and the substrate holder and provided with a plurality of pattern grooves, where the mask and the substrate are applied with a mask voltage (Vm) and a substrate voltage (V), respectively, the mask voltage (Vm) is a variable voltage, and the mask voltage (Vm) has the same polarity as the polarity of spray particles.


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