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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10150132 B1

PDFFull Text
Date of Patent:
Dec. 11, 2018

Filed:

Feb. 11, 2016

Thin film fabricating apparatus, and manufacturing method of organic light emitting device using the same, and organic light emitting device manufactured using the same

Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Nobuo Hamamoto, Suwon-si, KR;

Miyazaki Hiroshi, Hwaseong-si, KR;

Assignee:

SAMSUNG ELECTRONICS CO., LTD., Gyeonggi-Do, KR;

Attorney:

Cantor Colburn LLP

Primary Examiner:

Karl Kurple

Int. Cl.
CPC ...
B05B 12/20 (2018.01); B05B 5/025 (2006.01); B05B 5/08 (2006.01); B05B 5/053 (2006.01); B05C 21/00 (2006.01); H01L 51/56 (2006.01); B05D 1/32 (2006.01); C23C 14/04 (2006.01); H01L 51/00 (2006.01);
U.S. Cl.
CPC ...
B05B 12/20 (2018.02); B05B 5/0255 (2013.01); B05B 5/0533 (2013.01); B05B 5/0536 (2013.01); B05B 5/087 (2013.01); B05C 21/005 (2013.01); B05D 1/32 (2013.01); C23C 14/042 (2013.01); H01L 51/0003 (2013.01); H01L 51/56 (2013.01);
Abstract

A thin film fabricating apparatus includes an electrode part which sprays a thin film material as electrified spray particles, a substrate holder disposed facing the electrode part and holding a substrate to be provided with a thin film, and a mask disposed between the electrode part and the substrate holder and provided with a plurality of pattern grooves, where the mask and the substrate are applied with a mask voltage (Vm) and a substrate voltage (V), respectively, the mask voltage (Vm) is a variable voltage, and the mask voltage (Vm) has the same polarity as the polarity of spray particles.

Find Patent Forward Citations

Hamamoto, Nobuo. (2018). Thin film fabricating apparatus, and manufacturing method of organic light emitting device using the same, and organic light emitting device manufactured using the same (U.S. Patent No. 10150132). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10150132

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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