The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 11, 2018

Filed:

Sep. 30, 2014
Applicant:

Edwards Limited, West Sussex, GB;

Inventors:

Andrew James Seeley, Bristol, GB;

Alexander Michael Pope, Clevedon, GB;

Thomas Frank Cohn, Axbridge, GB;

Assignee:

Edwards Limited, Burgess Hill, West Sussex, GB;

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B03C 3/01 (2006.01); B01D 53/14 (2006.01); B03C 3/16 (2006.01); B03C 3/41 (2006.01); B03C 3/53 (2006.01);
U.S. Cl.
CPC ...
B03C 3/01 (2013.01); B01D 53/1456 (2013.01); B03C 3/16 (2013.01); B03C 3/41 (2013.01); B03C 3/53 (2013.01); B01D 53/14 (2013.01); B01D 2252/103 (2013.01); B01D 2257/2045 (2013.01); B01D 2257/2047 (2013.01); B01D 2257/553 (2013.01); B01D 2258/0216 (2013.01); B03C 2201/10 (2013.01);
Abstract

A gas treatment includes: a gas scrubber chamber operable to receive an effluent gas stream originating from a manufacturing process tool to be scrubbed therewithin to provide a scrubbed gas stream; and an electrostatic precipitation chamber operable to receive the scrubbed gas stream to be treated therewithin to provide a treated gas stream, one of the gas scrubber chamber and the electrostatic precipitation chamber defining a first chamber and another of the gas scrubber chamber and the electrostatic precipitation chamber defining a second chamber, the first chamber being configured to surround the second chamber. In this way, the first chamber and the second chamber can share the same volume.


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