The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2018
Filed:
Oct. 11, 2016
Applicant:
First Solar, Inc., Perrysburg, OH (US);
Inventors:
John Barden, Ottawa Hills, OH (US);
Rick C. Powell, Ann Arbor, MI (US);
Assignee:
First Solar, Inc., Perrysburg, OH (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/448 (2006.01); H01L 31/18 (2006.01); H01L 21/02 (2006.01); C23C 14/22 (2006.01); C23C 14/24 (2006.01); C23C 14/56 (2006.01); H01L 31/046 (2014.01); H01L 31/0296 (2006.01);
U.S. Cl.
CPC ...
H01L 31/1828 (2013.01); C23C 14/228 (2013.01); C23C 14/24 (2013.01); C23C 14/243 (2013.01); C23C 14/56 (2013.01); C23C 16/448 (2013.01); H01L 21/02557 (2013.01); H01L 21/02562 (2013.01); H01L 31/02963 (2013.01); H01L 31/046 (2014.12); Y02E 10/543 (2013.01); Y02P 70/521 (2015.11);
Abstract
An improved feeder system and method for continuous vapor transport deposition that includes at least two vaporizers coupled to a common distributor through an improved seal for separately vaporizing and collecting at least any two vaporizable materials for deposition as a material layer on a substrate. Multiple vaporizers provide redundancy and allow for continuous deposition during vaporizer maintenance and repair.