The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 04, 2018

Filed:

Nov. 06, 2015
Applicant:

Toshiba Memory Corporation, Minato-ku, JP;

Inventor:

Toshihiko Iinuma, Yokkaichi, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 27/115 (2017.01); H01L 23/532 (2006.01); H01L 21/768 (2006.01); H01L 23/528 (2006.01); H01L 27/11582 (2017.01); H01L 27/11565 (2017.01);
U.S. Cl.
CPC ...
H01L 27/11582 (2013.01); H01L 21/76802 (2013.01); H01L 21/76831 (2013.01); H01L 21/76877 (2013.01); H01L 27/11565 (2013.01);
Abstract

According to one embodiment, a semiconductor memory device includes a substrate; a stacked body including a plurality of electrode layers; a semiconductor film extending in stacking direction of the stacked body; an interconnect layer extending in the stacking direction of the stacked body and a first direction crossing the stacking direction; and an insulating film. The interconnect layer includes: a core film extending in the stacking direction and the first direction; an intermediate film provided integrally between the core film and the plurality of electrode layers and between the core film and the substrate; and a first conductive film provided integrally between the intermediate film and the plurality of electrode layers and between the intermediate film and the substrate, being in contact with the substrate, and having an upper surface flush with an upper surface of the intermediate film.


Find Patent Forward Citations

Iinuma, Toshihiko. (2018). Semiconductor memory device and method for manufacturing same (U.S. Patent No. 10147736). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10147736

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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