The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 04, 2018

Filed:

Jan. 04, 2016
Applicant:

Globalfoundries Inc., Grand Cayman, KY;

Inventors:

Bing Dang, Chappaqua, NY (US);

Michael A. Gaynes, Vestal, NY (US);

Paul A. Lauro, Brewster, NY (US);

Jae-Woong Nah, Closter, NJ (US);

Assignee:

GLOBALFOUNDRIES INC., Grand Cayman, KY;

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/02 (2006.01); H01L 23/00 (2006.01); C25D 5/02 (2006.01); C25D 7/12 (2006.01); H05K 3/34 (2006.01);
U.S. Cl.
CPC ...
H01L 24/11 (2013.01); C25D 5/022 (2013.01); H01L 21/02107 (2013.01); H01L 24/13 (2013.01); H01L 24/742 (2013.01); C25D 7/123 (2013.01); H01L 24/16 (2013.01); H01L 24/81 (2013.01); H01L 2224/11001 (2013.01); H01L 2224/11002 (2013.01); H01L 2224/1141 (2013.01); H01L 2224/1147 (2013.01); H01L 2224/1162 (2013.01); H01L 2224/11312 (2013.01); H01L 2224/11462 (2013.01); H01L 2224/13111 (2013.01); H01L 2224/13147 (2013.01); H01L 2224/13155 (2013.01); H01L 2224/16225 (2013.01); H01L 2224/81801 (2013.01); H01L 2924/014 (2013.01); H01L 2924/0132 (2013.01); H01L 2924/01322 (2013.01); H01L 2924/12042 (2013.01); H05K 3/3436 (2013.01); H05K 2201/10734 (2013.01);
Abstract

Solder bumps are provided on round wafers through the use of injection molded solder. Copper pillars or ball limiting metallurgy are formed over I/O pads within the channels of a patterned mask layer. Solder is injected over the pillars or BLM, filling the channels. Molten solder can be injected in cavities formed in round wafers without leakage using a carrier assembly that accommodates wafers that have been previously subjected to mask layer deposition and patterning. One such carrier assembly includes an elastomeric body portion having a round recess, the walls of the recess forming a tight seal with the round wafer. Other carrier assemblies employ adhesives applied around the peripheral edges of the wafers to ensure sealing between the carrier assemblies and wafers.


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