The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2018
Filed:
Feb. 09, 2017
Applicants:
Industrial Technology Research Institute, Hsinchu, TW;
Playnitride Inc., Tainan, TW;
Inventors:
Assignees:
Industrial Technology Research Institute, Hsinchu, TW;
PlayNitride Inc., Tainan, TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/67 (2006.01); H01L 21/683 (2006.01); H01L 33/62 (2010.01); H01L 33/00 (2010.01); H01L 21/66 (2006.01); H01L 23/00 (2006.01); G01R 31/26 (2014.01); H01L 33/06 (2010.01); H01L 33/12 (2010.01);
U.S. Cl.
CPC ...
H01L 21/67144 (2013.01); G01R 31/2635 (2013.01); H01L 21/6835 (2013.01); H01L 22/20 (2013.01); H01L 22/22 (2013.01); H01L 24/75 (2013.01); H01L 24/81 (2013.01); H01L 33/0095 (2013.01); H01L 33/62 (2013.01); H01L 33/06 (2013.01); H01L 33/12 (2013.01); H01L 2221/6835 (2013.01); H01L 2221/68368 (2013.01); H01L 2933/0066 (2013.01);
Abstract
An electric-programmable magnetic module comprising a micro electro mechanical system (MEMS) chip and a bonding equipment is provided. The MEMS chip comprises a plurality of electromagnetic coils and each of the electromagnetic coils is individually controlled. The MEMS chip is assembled with and carried by the bonding equipment.