The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2018
Filed:
Dec. 12, 2013
Applicant:
Nikon Corporation, Tokyo, JP;
Inventor:
Toshihisa Tanaka, Yokohama, JP;
Assignee:
NIKON CORPORATION, Tokyo, JP;
Primary Examiner:
Int. Cl.
CPC ...
H05G 1/02 (2006.01); G01N 23/04 (2018.01);
U.S. Cl.
CPC ...
G01N 23/04 (2013.01); G01N 2223/308 (2013.01); G01N 2223/33 (2013.01);
Abstract
An X-ray apparatus includes: an X-ray source that radiates X-rays upon an object to be measured; a frame upon which the X-ray source is mounted; an anti-vibration mechanism that attenuates vibration applied to the frame; and a shift mechanism that shifts the frame and the anti-vibration mechanism integrally together.