The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 04, 2018

Filed:

Mar. 04, 2014
Applicant:

Teknologian Tutkimuskeskus Vtt Oy, Espoo, FI;

Inventors:

Andrey Timofeev, Espoo, FI;

Juha Hassel, Espoo, FI;

Arttu Luukanen, Helsinki, FI;

Panu Helistö, Espoo, FI;

Leif Grönberg, Espoo, FI;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 5/20 (2006.01); G01J 5/02 (2006.01); H01L 37/00 (2006.01); G01J 5/10 (2006.01);
U.S. Cl.
CPC ...
G01J 5/20 (2013.01); G01J 5/024 (2013.01); H01L 37/00 (2013.01); G01J 2005/106 (2013.01); G01J 2005/208 (2013.01);
Abstract

A superconducting thermal detector (bolometer) of THz (sub-millimeter) wave radiation based on sensing the change in the amplitude or phase of a resonator circuit, consisting of a capacitor (Csh) and a superconducting temperature dependent inductor where the said inductor is thermally isolated from the heat bath (chip substrate) by micro-suspensions. The bolometer design includes a thin film inductor located on the membrane, a single or/and multi-layered thin film capacitor, and a thin film absorber of incoming radiation. The bolometer design can also include a lithographic antenna with antenna termination and/or a back reflector beneath the membrane for optimal wavelength detection by the resonance circuit. The superconducting thermal detector (bolometer) and arrays of these detectors operate in a temperature range from 1 Kelvin to 10 Kelvin.


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