The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2018
Filed:
Sep. 20, 2016
Applicants:
Kris Vossough, Palo Alto, CA (US);
Farhang Yazdani, San Jose, CA (US);
Inventors:
Kris Vossough, Palo Alto, CA (US);
Farhang Yazdani, San Jose, CA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 9/02 (2006.01); B81B 7/00 (2006.01); B81B 7/02 (2006.01); G01L 19/00 (2006.01); H04R 1/04 (2006.01); H04R 19/04 (2006.01); G01D 11/24 (2006.01); H04R 19/00 (2006.01); H04R 23/00 (2006.01); H04R 31/00 (2006.01);
U.S. Cl.
CPC ...
B81B 7/0029 (2013.01); B81B 7/0038 (2013.01); B81B 7/0064 (2013.01); B81B 7/02 (2013.01); G01D 11/245 (2013.01); G01L 19/0007 (2013.01); H04R 1/04 (2013.01); H04R 19/005 (2013.01); H04R 19/04 (2013.01); H04R 23/008 (2013.01); H04R 31/00 (2013.01);
Abstract
This invention describes the structure and function of an integrated multi-sensing systems in stacked configuration. Integrated systems described herein may be configured to form a microphone, pressure sensor, gas sensor or accelerometer. The method uses Fabry-Perot Interferometer in conjunction with light source and a photodetector integrated in stacked configuration. It also describes a configurable method for tuning the integrated system to specific resonance frequency using electrostatic actuators.