The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2018
Filed:
Feb. 27, 2017
Applicant:
Universiteit Twente, Enschede, NL;
Inventors:
Johan Willem Berenschot, Winterswijk, NL;
Niels Roelof Tas, Enschede, NL;
Assignee:
Universiteit Twente, Enschede, NL;
Primary Examiner:
Int. Cl.
CPC ...
B81B 1/00 (2006.01); B81C 1/00 (2006.01);
U.S. Cl.
CPC ...
B81B 1/004 (2013.01); B81C 1/00087 (2013.01); B81C 1/00111 (2013.01); B81B 2201/057 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0315 (2013.01); B81B 2203/0361 (2013.01); B81B 2203/0369 (2013.01); B81C 2201/0132 (2013.01);
Abstract
A method of manufacturing a plurality of through-holes () in a layer of material by subjecting the layer to directional dry etching to provide through-holes () in the layer of material; For batch-wise production, the method comprises