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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10141208 B1

PDFFull Text
Date of Patent:
Nov. 27, 2018

Filed:

Aug. 20, 2015

Vacuum processing apparatus

Applicant:

Canon Anelva Corporation, Kawasaki-shi, Kanagawa, JP;

Inventors:

Ryo Ishizaki, Kawasaki, JP;

Daisuke Kobinata, Tokyo, JP;

Naoki Kubota, Kawasaki, JP;

Kyosuke Sugi;

Assignee:

Canon Anelva Corporation, Kawasaki-shi, Kanagawa-ken, JP;

Attorney:

Buchanan Ingersoll & Rooney PC

Primary Examiner:

Karla A Moore

Assistant Examiner:

Tiffany Z Nuckols

Int. Cl.
CPC ...
H01L 21/67 (2006.01); C23C 14/22 (2006.01); C23C 14/54 (2006.01); H01J 37/32 (2006.01); H01L 21/687 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67115 (2013.01); C23C 14/225 (2013.01); C23C 14/541 (2013.01); H01J 37/32715 (2013.01); H01J 37/32724 (2013.01); H01L 21/6719 (2013.01); H01L 21/67109 (2013.01); H01L 21/68785 (2013.01); H01L 21/68792 (2013.01);
Abstract

A vacuum processing apparatus includes a tilting unit configured to tilt, in a vacuum vessel, a substrate holder including a refrigerator, and a rotary joint provided in the tilting unit and including a coolant path configured to supply or exhaust a coolant gas to or from the refrigerator. The rotary joint includes a fixed portion fixed to the vacuum vessel, a pivotal portion provided so as to pivot with respect to the fixed portion and fixed to the substrate holder, and a grease supply passage.

Find Patent Forward Citations

Ishizaki, Ryo. (2018). Vacuum processing apparatus (U.S. Patent No. 10141208). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10141208

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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