The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2018
Filed:
Jan. 28, 2016
Applicant:
National Technology & Engineering Solutions of Sandia, Llc, Albuquerque, NM (US);
Inventors:
Brian D. Homeijer, Albuquerque, NM (US);
Matt Eichenfield, Albuquerque, NM (US);
Assignee:
National Technology & Engineering Solutions of Sandia, LLC, Albuquerque, NM (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B 6/122 (2006.01); G02B 6/34 (2006.01); H01S 5/42 (2006.01); H01S 5/343 (2006.01); G02B 6/42 (2006.01); H01S 5/022 (2006.01);
U.S. Cl.
CPC ...
G02B 6/1225 (2013.01); G02B 6/34 (2013.01); G02B 6/4232 (2013.01); H01S 5/02248 (2013.01); H01S 5/02268 (2013.01); H01S 5/02272 (2013.01); H01S 5/343 (2013.01); H01S 5/426 (2013.01);
Abstract
The present application relates to vertically integrated assemblies including a MEMS-based optomechanical architecture. In some embodiments, the assembly includes a MEMS/optoelectronic module, an emitter module, and a detector module, where these modules are vertically integrated. Methods of fabricating such assemblies are also described herein.