The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2018
Filed:
Feb. 27, 2017
Nikon Corporation, Minato-ku, Tokyo, JP;
Nikon Metrology NV, Leuven, BE;
Mina A. Rezk, Bristow, VA (US);
Anthony R. Slotwinski, Reston, VA (US);
Daniel G. Smith, Tucson, AZ (US);
Eric Peter Goodwin, Oro Valley, AZ (US);
Alexander Cooper, Belmont, CA (US);
Thomas M. Hedges, Haymarket, VA (US);
Nikon Corporation, Tokyo, JP;
Abstract
Laser radar systems include a pentaprism configured to scan a measurement beam with respect to a target surface. A focusing optical assembly includes a corner cube that is used to adjust measurement beam focus. Target distance is estimated based on heterodyne frequencies between a return beam and a local oscillator beam. The local oscillator beam is configured to propagate to and from the focusing optical assembly before mixing with the return beam. In some examples, heterodyne frequencies are calibrated with respect to target distance using a Fabry-Perot interferometer having mirrors fixed to a lithium aluminosilicate glass-ceramic tube.