The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2018
Filed:
May. 15, 2015
Applicant:
Rohm Co., Ltd., Kyoto, JP;
Inventors:
Goro Nakatani, Kyoto, JP;
Yoshihiro Tada, Kyoto, JP;
Assignee:
ROHM CO., LTD., Kyoto, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01C 19/56 (2012.01); G01P 15/125 (2006.01); H01L 29/84 (2006.01); G01R 33/028 (2006.01); G01R 33/00 (2006.01); G01R 33/07 (2006.01);
U.S. Cl.
CPC ...
G01R 33/0286 (2013.01); G01R 33/0052 (2013.01); G01R 33/07 (2013.01);
Abstract
A MEMS sensor according to the present invention includes a base substrate including a displaceably supported movable portion and a lid substrate covering the movable portion and functioning as a magnetic sensor that detects magnetism by making use of the Hall effect.