The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 27, 2018

Filed:

Mar. 21, 2016
Applicant:

Albert-ludwigs-universitat Freiburg, Freiburg, DE;

Inventors:

Michael Maurer, Rheinhausen, DE;

Sebastian Nessler, Gundelfingen, DE;

Yiannos Manoli, Freiburg, DE;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/5726 (2012.01); G01C 19/5755 (2012.01); G01C 19/5762 (2012.01); G01C 19/5776 (2012.01); G01P 15/125 (2006.01);
U.S. Cl.
CPC ...
G01C 19/5726 (2013.01); G01C 19/5755 (2013.01); G01C 19/5762 (2013.01); G01C 19/5776 (2013.01); G01P 15/125 (2013.01);
Abstract

The invention relates to a detection circuit for reading out at least one position signal of a micromechanical capacitive sensor having at least one oscillating element that can be excited so as to move in an oscillating manner. In particular, the invention relates to a sensor that is operated in a closed control loop by using the detection circuit according to the invention. The invention further relates to a method for operating such a sensor. During operation, a first input connection of the detection circuit () is connected to an output connection of the capacitive sensor () and an output connection of the detection circuit () is connected to a loop filter of a control loop (), wherein the control loop feeds back a feedback voltage for providing a restoring force in dependence on an output voltage of the control loop () to a second input connection of the detection circuit (). The detection circuit () comprises at least one further feedback branch (R, C), and the output voltage of the control loop () is modulated onto an in-phase input voltage of the detection circuit.


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