The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 27, 2018

Filed:

Aug. 17, 2016
Applicants:

Ut-battelle, Llc, Oak Ridge, TN (US);

Remaxco Technologies, Knoxville, TN (US);

Inventors:

Felix L. Paulauskas, Knoxville, TN (US);

Truman Bonds, Knoxville, TN (US);

Assignees:

UT-Battelle, LLC, Oak Ridge, TN (US);

REMAXCO TECHNOLOGIES, Knoxville, TN (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 37/00 (2006.01); C08F 8/06 (2006.01); B01J 19/08 (2006.01); H01J 37/32 (2006.01); H05H 1/24 (2006.01); D01F 9/32 (2006.01); D06B 19/00 (2006.01); D01F 9/22 (2006.01);
U.S. Cl.
CPC ...
C08F 8/06 (2013.01); B01J 19/087 (2013.01); B01J 19/088 (2013.01); D01F 9/22 (2013.01); D01F 9/328 (2013.01); D06B 19/00 (2013.01); H01J 37/3277 (2013.01); H01J 37/32348 (2013.01); H01J 37/32522 (2013.01); H05H 1/2406 (2013.01); B01J 2219/083 (2013.01); B01J 2219/0809 (2013.01); B01J 2219/0824 (2013.01); B01J 2219/0871 (2013.01); B01J 2219/0879 (2013.01); B01J 2219/0894 (2013.01); H05H 2001/2412 (2013.01); H05H 2001/2437 (2013.01);
Abstract

A plasma treatment method that includes providing treatment chamber including an intermediate heating volume and an interior treatment volume. The interior treatment volume contains an electrode assembly for generating a plasma and the intermediate heating volume heats the interior treatment volume. A work piece is traversed through the treatment chamber. A process gas is introduced to the interior treatment volume of the treatment chamber. A plasma is formed with the electrode assembly from the process gas, wherein a reactive species of the plasma is accelerated towards the fiber tow by flow vortices produced in the interior treatment volume by the electrode assembly.


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