The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 20, 2018

Filed:

Aug. 07, 2012
Applicants:

Arno Plankensteiner, Absam, AT;

Christian Feist, Innsbruck, AT;

Vadim Boguslavskiy, Princeton, NJ (US);

Alexander I. Gurary, Bridgewater, NJ (US);

Chenghung Paul Chang, Easton, PA (US);

Inventors:

Arno Plankensteiner, Absam, AT;

Christian Feist, Innsbruck, AT;

Vadim Boguslavskiy, Princeton, NJ (US);

Alexander I. Gurary, Bridgewater, NJ (US);

Chenghung Paul Chang, Easton, PA (US);

Assignees:

Plansee SE, Reutte, AT;

Veeco Instruments Inc., Plainview, NY (US);

Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
H05B 1/00 (2006.01); C23C 16/458 (2006.01); C23C 16/46 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
H05B 1/00 (2013.01); C23C 16/4585 (2013.01); C23C 16/46 (2013.01); H01L 21/67115 (2013.01);
Abstract

A terminal for mechanical support of a heating element, includes a base device, a mounting device, the mounting device adapted to support the heating element, and a support device connecting the base device to the mounting device, the support device allowing displacement of the heating element about a radial axis and less than about 10% displacement of the heating element about a tangential and/or axial axis.


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