The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2018
Filed:
Dec. 18, 2015
Applicant:
Texas Instruments Incorporated, Dallas, TX (US);
Inventors:
Joel Soman, Dallas, TX (US);
Iouri Mirgorodski, Sunnyvale, CA (US);
Nicholas Stephen Dellas, Dallas, TX (US);
Assignee:
TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
H03H 3/007 (2006.01); H03H 3/04 (2006.01); G01H 13/00 (2006.01);
U.S. Cl.
CPC ...
H03H 3/04 (2013.01); G01H 13/00 (2013.01); H03H 2003/0428 (2013.01);
Abstract
A method of tuning the resonant frequency of embedded bulk acoustic resonators during manufacturing of an integrated circuit. The rate of change in the resonant frequency of BAWs vs rate of change in top electrode thickness is determined and used to tune the resonant frequency of embedded bulk acoustic resonators during integrated circuit manufacturing.