The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2018
Filed:
Oct. 27, 2017
Applicant:
Boe Technology Group Co., Ltd., Beijing, CN;
Inventors:
Xiangjun Tian, Beijing, CN;
Yan Chen, Beijing, CN;
Xueyong Wang, Beijing, CN;
Zhi Wang, Beijing, CN;
Assignee:
BOE TECHNOLOGY GROUP CO., LTD., Beijing, CN;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/00 (2006.01); H01S 3/08 (2006.01); H01L 21/268 (2006.01); H01L 21/67 (2006.01); H01S 3/036 (2006.01); H01L 21/02 (2006.01); H01L 21/324 (2006.01); H01S 3/034 (2006.01); H01S 3/225 (2006.01); H01S 3/23 (2006.01);
U.S. Cl.
CPC ...
H01S 3/08059 (2013.01); H01L 21/02422 (2013.01); H01L 21/02595 (2013.01); H01L 21/2686 (2013.01); H01L 21/324 (2013.01); H01L 21/67098 (2013.01); H01S 3/034 (2013.01); H01S 3/036 (2013.01); H01S 3/225 (2013.01); H01S 3/23 (2013.01);
Abstract
The embodiments of the present disclosure provide an optical device and an excimer laser annealing equipment. The optical device includes: a light source; a transparent window spaced apart from the light source by a distance; and an optical system disposed between the light source and the transparent window. The transparent window is configured such that emergent light of the light source is vertically incident onto the transparent window after passing through the optical system.