The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2018
Filed:
Oct. 16, 2015
Applicant:
Seiko Epson Corporation, Tokyo, JP;
Inventors:
Takayuki Yonemura, Suwa, JP;
Tsutomu Asakawa, Shiojiri, JP;
Assignee:
Seiko Epson Corporation, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 41/187 (2006.01); H01L 41/047 (2006.01); H01L 41/29 (2013.01); B41J 2/14 (2006.01); H01L 41/08 (2006.01); H01L 41/09 (2006.01); B41J 2/16 (2006.01);
U.S. Cl.
CPC ...
H01L 41/29 (2013.01); B41J 2/14233 (2013.01); B41J 2/161 (2013.01); B41J 2/1628 (2013.01); B41J 2/1629 (2013.01); B41J 2/1631 (2013.01); B41J 2/1645 (2013.01); H01L 41/0477 (2013.01); H01L 41/0815 (2013.01); H01L 41/0973 (2013.01); H01L 41/1875 (2013.01); B41J 2002/14241 (2013.01); B41J 2002/14491 (2013.01);
Abstract
A piezoelectric element has, from a substrate side, a first electrode, a piezoelectric layer containing a composite oxide of an ABOtype perovskite structure containing Mg, and a second electrode, which are laminated, in which the first electrode includes a diffusion suppressing layer which suppresses diffusion of the Mg and a diffusion layer which diffuses the Mg as compared with the diffusion suppressing layer, and the diffusion suppressing layer is provided on the substrate side relative to the diffusion layer.