The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 20, 2018

Filed:

Jul. 17, 2017
Applicant:

Fujitsu Limited, Kawasaki-shi, Kanagawa, JP;

Inventor:

Tsuyoshi Takahashi, Ebina, JP;

Assignee:

Fujitsu Limited, Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/778 (2006.01); H01L 29/10 (2006.01); H01L 29/205 (2006.01); H01L 29/08 (2006.01); H01L 29/15 (2006.01); H01L 21/02 (2006.01); H01L 29/207 (2006.01); H01L 29/20 (2006.01);
U.S. Cl.
CPC ...
H01L 29/778 (2013.01); H01L 29/0843 (2013.01); H01L 29/1058 (2013.01); H01L 29/155 (2013.01); H01L 29/205 (2013.01); H01L 29/66462 (2013.01); H01L 29/7784 (2013.01); H01L 21/0262 (2013.01); H01L 21/02392 (2013.01); H01L 21/02463 (2013.01); H01L 21/02546 (2013.01); H01L 21/02576 (2013.01); H01L 29/2003 (2013.01); H01L 29/207 (2013.01); H01L 29/7787 (2013.01);
Abstract

A disclosed compound semiconductor device includes a substrate, a channel layer formed over the substrate, an electron supply layer famed on the channel layer, a first cap layer and a second cap layer formed at a distance from each other on the electron supply layer, a source electrode formed on the first cap layer, a drain electrode formed on the second cap layer, and a gate electrode formed on the electron supply layer between the first cap layer and the second cap layer. Each of the first cap layer and the second cap layer is a stacked film formed by alternately stacking i-type first compound semiconductor layers and n-type second compound semiconductor layers having a wider bandgap than the first compound semiconductor layers.


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