The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 20, 2018

Filed:

Feb. 10, 2017
Applicant:

Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E.v., München, DE;

Inventors:

Kai Zoschke, Berlin, DE;

Michael Töpper, Berlin, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 3/02 (2006.01); H01L 23/00 (2006.01); B32B 7/14 (2006.01); B32B 37/12 (2006.01);
U.S. Cl.
CPC ...
H01L 24/83 (2013.01); B32B 7/14 (2013.01); B32B 37/1292 (2013.01); H01L 24/27 (2013.01); H01L 24/32 (2013.01); H01L 24/94 (2013.01); B32B 2250/02 (2013.01); B32B 2255/26 (2013.01); B32B 2255/28 (2013.01); B32B 2323/00 (2013.01); B32B 2457/14 (2013.01); H01L 2224/279 (2013.01); H01L 2224/2731 (2013.01); H01L 2224/27416 (2013.01); H01L 2224/27418 (2013.01); H01L 2224/27436 (2013.01); H01L 2224/27515 (2013.01); H01L 2224/27632 (2013.01); H01L 2224/29007 (2013.01); H01L 2224/29011 (2013.01); H01L 2224/2919 (2013.01); H01L 2224/29082 (2013.01); H01L 2224/32145 (2013.01); H01L 2224/32148 (2013.01); H01L 2224/8385 (2013.01); H01L 2224/83139 (2013.01); H01L 2224/83191 (2013.01); H01L 2224/83193 (2013.01); H01L 2224/83201 (2013.01); H01L 2224/83203 (2013.01); H01L 2224/83856 (2013.01); H01L 2224/83862 (2013.01); H01L 2224/83874 (2013.01); H01L 2224/83905 (2013.01); H01L 2224/94 (2013.01);
Abstract

The present invention relates to a bonding method for connecting a first wafer and a second wafer, wherein firstly a first adhesive layer is deposited onto a surface of the first wafer. Furthermore, a second adhesive layer is deposited onto the first adhesive layer, and the two adhesive layers are structured by way of selective removal of both adhesive layers in at least one predefined region of the first wafer, Moreover, the first wafer is connected to the second wafer by way of pressing a surface of the second wafer onto the second adhesive layer, wherein the second adhesive layer is more flowable that the first adhesive layer on connecting the first wafer to the second wafer.


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