The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2018
Filed:
Sep. 13, 2017
Hitachi Kokusai Electric Inc., Tokyo, JP;
Yasuhiro Mizuguchi, Toyama, JP;
HITACHI KOKUSAI ELECTRIC INC., Tokyo, JP;
Abstract
There is provided a method of manufacturing a semiconductor device, including: transferring a substrate to a module having a first process chamber and a second process chamber; reading a recipe program depending on a type and a number of the substrate; and processing the substrate according to the recipe program, wherein in the act of processing the substrate, a first data indicating a state of the first process chamber and a second data indicating a state of the second process chamber are respectively detected, and a comparison between the first data and a previously-acquired first reference data and a comparison between the second data and a previously-acquired second reference data are displayed on a display screen.