The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 20, 2018

Filed:

Jun. 12, 2014
Applicant:

General Plasma, Inc., Tucson, AZ (US);

Inventor:

John E. Madocks, Tucson, AZ (US);

Assignee:

General Plasma, Inc., Tucson, AZ (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 27/14 (2006.01); H01J 27/10 (2006.01); H01J 27/02 (2006.01); H01J 37/08 (2006.01);
U.S. Cl.
CPC ...
H01J 27/14 (2013.01); H01J 27/024 (2013.01); H01J 27/10 (2013.01); H01J 37/08 (2013.01);
Abstract

A linear anode layer ion source is provided that includes a top pole having a linear ion emitting slit. An anode under the top pole has a slit aligned with the top pole ion emitting slit. At least one magnet creates a magnetic field that passes through the anode slit. Wherein the width of the anode slit is 3 mm or less. A process of generating an accelerated ion beam is also provided that includes flowing a gas into proximity to said anode. By energizing a power supply electron flow is induced to the anode and the gas is ionized. Accelerating the ions from the anode through the linear ion emitting slit generates an accelerated ion beam by a process superior to that using a racetrack-shaped slit.


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