The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2018
Filed:
Nov. 11, 2015
Canon Kabushiki Kaisha, Tokyo, JP;
Masaki Mizutani, Utsunomiya, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
Provided is an illumination optical apparatus for illuminating a mask with light from a light source. The apparatus includes an optical integrator configured to cause a light intensity distribution to be uniform in an emission end surface by reflecting the light incident from an incident end surface in an inner surface a plurality of times, an image forming optical system configured to form an image of the emission end surface of the optical integrator on the mask, and an adjustment unit configured to adjust telecentricity of the light so that a principal ray incident on the mask and a normal line of the mask approach parallelism and configured to be disposed outside the image forming optical system.