The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2018
Filed:
Jun. 24, 2015
Applicant:
Stmicroelectronics S.r.l., Agrate Brianza, IT;
Inventors:
Sara Loi, Cagliari, IT;
Alberto Pagani, Nova Milanese, IT;
Assignee:
STMICROELECTRONICS S.R.L., Agrate Brianza (MB), IT;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01T 1/178 (2006.01); G01N 15/02 (2006.01); G01N 15/06 (2006.01); G01T 1/24 (2006.01); G01T 1/29 (2006.01); G01N 15/00 (2006.01); G01N 15/10 (2006.01); G01N 1/22 (2006.01); F04B 19/06 (2006.01); F04B 37/00 (2006.01);
U.S. Cl.
CPC ...
G01T 1/178 (2013.01); G01N 15/02 (2013.01); G01N 15/06 (2013.01); G01T 1/244 (2013.01); G01T 1/2928 (2013.01); F04B 19/06 (2013.01); F04B 37/00 (2013.01); G01N 15/0205 (2013.01); G01N 15/10 (2013.01); G01N 2001/2276 (2013.01); G01N 2015/035 (2013.01);
Abstract
A detection device is formed in a body of semiconductor material having a first face, a second face, and a cavity. A detection area formed in the cavity, and a gas pump is integrated in the body and configured to force movement of gas towards the detection area. A detection system of an optical type or a detector of alpha particles is arranged at least in part in the detection area.