The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 20, 2018

Filed:

Dec. 19, 2014
Applicant:

Industrial Technology Research Institute, Hsinchu, TW;

Inventors:

Chung-Yuan Su, Taichung, TW;

Chao-Ta Huang, Hsinchu, TW;

Sheng-Ren Chiu, Tainan, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/5712 (2012.01); G01R 33/02 (2006.01);
U.S. Cl.
CPC ...
G01R 33/02 (2013.01); G01C 19/5712 (2013.01);
Abstract

A micro-electromechanical apparatus may include a substrate, a first frame, a plurality of first anchors, a region and a plurality of pivot elements. The plurality of first anchors and the region is disposed on the substrate. The region is surrounded by the plurality of first anchors. Each of the pivot elements includes a pivot end and a rotary end. Each of the pivot ends is connected to a corresponding first anchor and each of the rotary ends is connected to the first frame such that the first frame is able to rotate with respect to an axis passing the region. The micro-electromechanical apparatus having the pivot elements and the region is adapted for detecting multi-degree physical quantities such as angular velocities in at least two axes, angular velocities and accelerations, angular velocities and Earth's magnetic field.


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