The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 20, 2018

Filed:

May. 17, 2017
Applicants:

Tsinghua University, Beijing, CN;

Hon Hai Precision Industry Co., Ltd., New Taipei, TW;

Inventors:

Jiang-Tao Wang, Beijing, CN;

Xiang Jin, Beijing, CN;

Peng Liu, Beijing, CN;

Yang Wei, Beijing, CN;

Kai-Li Jiang, Beijing, CN;

Shou-Shan Fan, Beijing, CN;

Assignees:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01R 29/24 (2006.01); G01N 27/02 (2006.01); H01L 51/00 (2006.01); H01L 21/66 (2006.01); C23C 16/26 (2006.01); C23C 16/46 (2006.01); G01N 27/22 (2006.01); G01R 15/12 (2006.01); G01R 31/02 (2006.01); C23C 16/52 (2006.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
G01N 27/02 (2013.01); C23C 16/26 (2013.01); C23C 16/46 (2013.01); C23C 16/52 (2013.01); G01N 27/226 (2013.01); G01R 15/12 (2013.01); G01R 29/24 (2013.01); G01R 31/025 (2013.01); G01R 31/026 (2013.01); H01L 22/14 (2013.01); H01L 51/0002 (2013.01); H01L 51/0031 (2013.01); H01L 51/0048 (2013.01); B82Y 40/00 (2013.01);
Abstract

A method for in-situ measuring electrical properties of carbon nanotubes includes placing a first electrode in a chamber, wherein the first electrode defines a cavity. A growth substrate is suspend inside of the cavity, and a catalyst layer is located on the growth substrate. A measuring meter having a first terminal and a second terminal opposite to the first terminal is provided. The first terminal is electrically connected to the first electrode, and the second terminal is electrically connected to the growth substrate. A carbon source gas, a protective gas, and hydrogen are supplied to the cavity, to grow the carbon nanotubes on the catalyst layer. The electrical properties of the carbon nanotubes are obtained by the measuring meter.


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