The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 20, 2018

Filed:

Apr. 17, 2015
Applicant:

Denso Corporation, Kariya, Aichi-pref., JP;

Inventors:

Minekazu Sakai, Kariya, JP;

Naoki Yoshida, Kariya, JP;

Kiyomasa Sugimoto, Kariya, JP;

Assignee:

DENSO CORPORATION, Kariya, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01C 19/5607 (2012.01); G01C 19/5614 (2012.01); G01C 19/5621 (2012.01); G01C 19/5628 (2012.01); G01C 19/5642 (2012.01); H01L 41/047 (2006.01); H03H 9/21 (2006.01); H01L 41/04 (2006.01); H01L 41/113 (2006.01);
U.S. Cl.
CPC ...
G01C 19/5614 (2013.01); G01C 19/5607 (2013.01); G01C 19/5621 (2013.01); G01C 19/5628 (2013.01); G01C 19/5642 (2013.01); H01L 41/042 (2013.01); H01L 41/047 (2013.01); H01L 41/1132 (2013.01); H03H 9/21 (2013.01);
Abstract

An angular velocity sensor includes a first substrate having first and second surfaces, a vibrating member disposed on the first substrate and including a drive piece capable of vibrating along the first substrate, a second substrate disposed on the first surface side, a first drive piece control electrode, a first drive piece auxiliary electrode, and a first drive piece control circuit applying a voltage to the first drive piece auxiliary electrode. The first drive piece control circuit adjusts, based on the capacitance generated between the first drive piece control electrode and the first drive piece auxiliary electrode, the voltage to be applied to the first drive piece auxiliary electrode to maintain a constant distance between the first drive piece control electrode and the first drive piece auxiliary electrode.


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