The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2018
Filed:
Apr. 26, 2016
Applicant:
Lam Research Corporation, Fremont, CA (US);
Inventors:
Gary Bridger Lind, Nevada City, CA (US);
Panya Wongsenakhum, Santa Clara, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F16K 1/32 (2006.01); G05D 7/00 (2006.01); F16K 51/00 (2006.01); F16K 31/122 (2006.01);
U.S. Cl.
CPC ...
F16K 1/32 (2013.01); F16K 51/00 (2013.01); G05D 7/00 (2013.01); F16K 31/122 (2013.01); F16K 31/1221 (2013.01);
Abstract
A gas inlet valve with incompatible materials isolation is provided. The valve may include a piston that seals against a surface when in a closed position and that permits gas to flow through the valve and out the outlet port when in an open position. A bellows may protect the actuation mechanism of the piston from gas that may be present in the valve when the valve is in the open or closed position, and the piston may include a second seal interface that seals the bellows off from the gas flow area when the valve is in the open or closed position.