The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2018
Filed:
Aug. 08, 2017
Applicant:
Up Chemical Co., Ltd., Pyeongtaek-si, Gyeonggi-do, KR;
Inventors:
Assignee:
UP CHEMICAL CO., LTD., Pyeongtaek-si, Gyeonggi-do, KR;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C07F 7/28 (2006.01); C01G 27/02 (2006.01); C23C 16/40 (2006.01); C07F 7/00 (2006.01); C23C 16/455 (2006.01); C01G 25/02 (2006.01); C01G 23/04 (2006.01); C09D 1/00 (2006.01);
U.S. Cl.
CPC ...
C07F 7/28 (2013.01); C01G 23/04 (2013.01); C01G 25/02 (2013.01); C01G 27/02 (2013.01); C07F 7/00 (2013.01); C09D 1/00 (2013.01); C23C 16/405 (2013.01); C23C 16/45553 (2013.01);
Abstract
The present disclosure provides a Group 4 metal element-containing novel alkoxy compound, a method of preparing the Group 4 metal element-containing alkoxy compound, a precursor composition including the Group 4 metal element-containing alkoxy compound for depositing a film, and a method of depositing a Group 4 metal element-containing film using the precursor composition.