The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2018
Filed:
Apr. 21, 2016
Canon Kabushiki Kaisha, Tokyo, JP;
Naoko Ogata, Tokyo, JP;
Canon Kabushiki Kaisha, Tokyo, JP;
Abstract
An inspection apparatus, including: a measurement optics system configured to scan an object to be inspected with measuring light from a light source; a dividing unit, which is arranged at a position conjugate with the object to be inspected, and is configured to divide return light, being the measuring light returning from the object to be inspected, into a plurality of light beams; a photo-receiving unit configured to receive the plurality of light beams obtained by the division; a recording unit configured to record image data of the object to be inspected, which is based on a plurality of intensity signals output by the photo-receiving unit, and a division direction in which the return light is divided, the image data being associated with the division direction; and an analysis unit configured to analyze the image data based on the associated division direction.