The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2018
Filed:
Feb. 16, 2016
Mems microphone, apparatus comprising a mems microphone and method for fabricating a mems microphone
Applicant:
Infineon Technologies Ag, Neubiberg, DE;
Inventors:
Arnaud Walther, Unterhaching, DE;
Alfons Dehe, Reutlingen, DE;
Assignee:
Infineon Technologies AG, Neubiberg, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H04R 29/00 (2006.01); B81C 1/00 (2006.01); G01K 7/02 (2006.01); H04R 3/00 (2006.01); H04R 19/00 (2006.01); H04R 19/04 (2006.01); B81B 7/02 (2006.01); G01K 1/14 (2006.01); H04R 7/10 (2006.01);
U.S. Cl.
CPC ...
H04R 29/004 (2013.01); B81B 7/02 (2013.01); B81C 1/00158 (2013.01); G01K 1/14 (2013.01); G01K 7/02 (2013.01); G01K 7/028 (2013.01); H04R 3/00 (2013.01); H04R 19/005 (2013.01); H04R 19/04 (2013.01); B81B 2201/0257 (2013.01); B81B 2201/0278 (2013.01); H04R 7/10 (2013.01); H04R 2307/027 (2013.01); H04R 2499/11 (2013.01);
Abstract
A MEMS microphone and a method for manufacturing a MEMS microphone are disclosed. Embodiments of the invention provide a MEMS microphone including a MEMS microphone structure having at least one counter electrode structure and a diaphragm structure deflectable with respect to the counter electrode structure and a thermocouple arranged at the MEMS microphone structure.
Walther, Arnaud. (2018). Mems microphone, apparatus comprising a mems microphone and method for fabricating a mems microphone (U.S. Patent No. 10129676). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10129676
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile