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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10128430 B1

PDFFull Text
Date of Patent:
Nov. 13, 2018

Filed:

Jan. 11, 2016

Vibration element manufacturing method, vibration element, electronic device, electronic apparatus, and moving object

Applicant:

Seiko Epson Corporation, Tokyo, JP;

Inventors:

Yohei Yamada, Chino, JP;

Atsushi Matsuo, Okaya, JP;

Toshihiro Il, Minamiminowa, JP;

Takatoshi Sugiyama, Tatsuno, JP;

Assignee:

Seiko Epson Corporation, , JP;

Attorney:

Harness, Dickey & Pierce, P.L.C.

Primary Examiner:

J San Martin

Int. Cl.
CPC ...
H01L 41/09 (2006.01); H01L 41/04 (2006.01); G01C 19/56 (2012.01); H03H 9/05 (2006.01); H03H 9/215 (2006.01); H03H 9/24 (2006.01); H01L 41/331 (2013.01); H01L 41/332 (2013.01); H03H 3/02 (2006.01);
U.S. Cl.
CPC ...
H01L 41/09 (2013.01); G01C 19/56 (2013.01); H01L 41/042 (2013.01); H03H 9/0547 (2013.01); H03H 9/215 (2013.01); H03H 9/2468 (2013.01); H01L 41/331 (2013.01); H01L 41/332 (2013.01); H03H 2003/026 (2013.01); H03H 2003/027 (2013.01);
Abstract

A method of manufacturing a gyro element as a vibration element is a manufacturing method of processing a quartz crystal substrate to form an outward shape of a gyro element including a vibrating arm and form recessed portions in a vibrating arm. The method includes forming the outward shape of a gyro element from one surface of the quartz crystal substrate using dry etching and forming the recessed portions using wet etching.

Find Patent Forward Citations

Yamada, Yohei. (2018). Vibration element manufacturing method, vibration element, electronic device, electronic apparatus, and moving object (U.S. Patent No. 10128430). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10128430

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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