The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 13, 2018

Filed:

Aug. 31, 2017
Applicant:

Rfhic Corporation, Anyang-si, KR;

Inventors:

Sam Yul Cho, Raleigh, NC (US);

Won Sang Lee, Chapel Hill, NC (US);

Assignee:

RFHIC CORPORATION, Anyang, KR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/338 (2006.01); H01L 21/02 (2006.01); H01L 21/78 (2006.01); H01L 29/66 (2006.01); H01L 29/778 (2006.01);
U.S. Cl.
CPC ...
H01L 21/0254 (2013.01); H01L 21/0259 (2013.01); H01L 21/0262 (2013.01); H01L 21/02381 (2013.01); H01L 21/02527 (2013.01); H01L 21/02529 (2013.01); H01L 21/02664 (2013.01); H01L 21/7806 (2013.01); H01L 29/66462 (2013.01); H01L 29/778 (2013.01);
Abstract

Wafers including a diamond layer and a semiconductor layer having III-Nitride compounds and methods for fabricating the wafers are provided. A first SiC layer is formed on a silicon substrate, and using a carbon containing gas, a surface of the first SiC layer is carbonized to form carbon particles on the SiC layer. Then, a diamond layer is grown on the carbonized surface, where the carbon atoms act as seed particles for growing the diamond layer. A second SiC layer is formed on the diamond layer and a semiconductor layer having III-Nitride compounds is formed on the second SiC layer. Then, the silicon substrate and the first SiC layer are removed.


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