logo

For the Inventor, By the Inventor

The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 10126650 B1

PDFFull Text
Date of Patent:
Nov. 13, 2018

Filed:

Jun. 24, 2016

Resist composition

Applicant:

Sumitomo Chemical Company, Limited, Tokyo, JP;

Inventors:

Takayuki Miyagawa, Osaka, JP;

Kaoru Araki, Osaka, JP;

Koji Ichikawa, Osaka, JP;

Assignee:

SUMITOMO CHEMICAL COMPANY, LIMITED, Tokyo, JP;

Attorney:

Birch, Stewart, Kolasch & Birch, LLP

Primary Examiner:

John S Chu

Int. Cl.
CPC ...
G03F 7/004 (2006.01); G03F 7/30 (2006.01); C08F 220/24 (2006.01); C08F 224/00 (2006.01); G03F 7/039 (2006.01); G03F 7/20 (2006.01); C08F 220/28 (2006.01);
U.S. Cl.
CPC ...
G03F 7/0397 (2013.01); C08F 220/24 (2013.01); C08F 224/00 (2013.01); G03F 7/2041 (2013.01); C08F 2220/282 (2013.01);
Abstract

A resist composition which contains a resin (A1) which has a structural unit having a cyclic carbonate, a structural unit represented by formula (II) and a structural unit having an acid-labile group, and an acid generator: wherein Rrepresents a hydrogen atom, a halogen atom or a Cto Calkyl group that may have a halogen atom, Lrepresents a single bond or *-L-CO—O-(L-CO—O)— where * represents a binding position to an oxygen atom, Land Lindependently represent a Cto Cdivalent hydrocarbon group, g represents 0 or 1, and Rrepresents a Cto Cliner or branched alkyl group except for a tertiary alkyl group.

Find Patent Forward Citations

Miyagawa, Takayuki. (2018). Resist composition (U.S. Patent No. 10126650). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10126650

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

Loading…