The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2018
Filed:
Sep. 30, 2015
Canon Kabushiki Kaisha, Tokyo, JP;
CANON KABUSHIKI KAISHA, Tokyo, JP;
Abstract
An object is to enable removal fixed pattern noise even if the intensity of interference light changes during measurement. An image capturing apparatus comprises a light splitting unit that splits light emitted from a light source into reference light and measurement light, an interference signal detection unit that acquires an interference signal from interference light resulting from interference of the reference light and return light generated by irradiating an object to be inspected with the measurement light, a noise signal acquisition unit that acquires a noise signal containing a noise component contained in the interference light, a correction unit that corrects the intensity of one of the interference signal and the noise signal, and a noise removal unit that removes the noise component contained in the interference signal using the interference signal and the noise signal one of which is corrected.