The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 13, 2018
Filed:
Aug. 03, 2017
View, Inc., Milpitas, CA (US);
Martin John Neumann, Pekin, IL (US);
Que Anh Song Nguyen, San Jose, CA (US);
Anshu A. Pradhan, Collierville, TN (US);
Robert T. Rozbicki, Los Gatos, CA (US);
Dhairya Shrivastava, Los Altos, CA (US);
Jason Satern, Morgan Hill, CA (US);
Todd Martin, Mountain View, CA (US);
View, Inc., Milpitas, CA (US);
Abstract
Described are methods of fabricating lithium sputter targets, lithium sputter targets, associated handling apparatus, and sputter methods including lithium targets. Various embodiments address adhesion of the lithium metal target to a support structure, avoiding and/or removing passivating coatings formed on the lithium target, uniformity of the lithium target as well as efficient cooling of lithium during sputtering. Target configurations used to compensate for non-uniformities in sputter plasma are described. Modular format lithium tiles and methods of fabrication are described. Rotary lithium sputter targets are also described.