The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Nov. 06, 2018

Filed:

Jan. 30, 2013
Applicant:

Vi Systems Gmbh, Berlin, DE;

Inventors:

Nikolay Ledentsov, Berlin, DE;

Vitaly Shchukin, Berlin, DE;

Assignee:

VI SYSTEMS GMBH, Berlin, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 33/04 (2010.01); H01S 5/34 (2006.01); H01S 5/32 (2006.01); H01S 5/22 (2006.01); H01L 33/00 (2010.01);
U.S. Cl.
CPC ...
H01L 33/04 (2013.01); H01L 33/0062 (2013.01); H01S 5/2228 (2013.01); H01S 5/3201 (2013.01); H01S 5/3216 (2013.01); H01S 5/341 (2013.01);
Abstract

A method for fabrication of three-dimensional nanostructures on top of the surface of a first solid state material is disclosed, which includes steps of (i) deposition of a layer of a second solid state material forming a stable layer-like coverage of the surface, (ii) the subsequent deposition of a third solid state material, having a stronger binding energy with the first solid state material than the second solid state material, (iii) wherein the third solid state material replaces the second solid state material forming an interface with the first material and thus reduces the energy of the system, and (iv) where the resulting excess second solid state material forms three-dimensional nanostructures. The structure can be covered with another (fourth) solid state material, which eventually can be the same as the first material or a different one, and the three dimensional nanostructures form capped quantum dots or quantum wires. The deposition steps can be repeated and extended to provide necessary functionality in the resulting device structure.


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