The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 06, 2018
Filed:
Oct. 01, 2014
Applicant:
Toshiba Mitsubishi-electric Industrial Systems Corporation, Chuo-ku, JP;
Inventors:
Takahiro Shirahata, Tokyo, JP;
Hiroyuki Orita, Tokyo, JP;
Assignee:
Primary Examiner:
Int. Cl.
CPC ...
B05C 5/02 (2006.01); B05C 9/06 (2006.01); B05C 9/14 (2006.01); C23C 16/455 (2006.01); C03C 17/00 (2006.01); C23C 16/448 (2006.01); H01L 21/31 (2006.01); H01L 21/67 (2006.01); B05B 7/00 (2006.01); B05B 17/06 (2006.01);
U.S. Cl.
CPC ...
B05C 5/0279 (2013.01); B05B 7/0012 (2013.01); B05C 5/0254 (2013.01); B05C 9/06 (2013.01); B05C 9/14 (2013.01); C03C 17/001 (2013.01); C23C 16/4486 (2013.01); C23C 16/45514 (2013.01); C23C 16/45517 (2013.01); C23C 16/45563 (2013.01); H01L 21/31 (2013.01); H01L 21/67017 (2013.01); B05B 17/06 (2013.01);
Abstract
A film forming apparatus includes a mist spray head for spraying a raw material. The mist spray head includes a raw material spray nozzle and a raw material ejection part for ejecting an atomized raw material, and the raw material spray nozzle includes a cavity and a raw material discharge part which is drilled in a side surface of the cavity, being away from a bottom surface of the cavity, and is connected to the raw material ejection part.