The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 30, 2018

Filed:

Jun. 29, 2016
Applicant:

Nichia Corporation, Anan-shi, Tokushima, JP;

Inventors:

Hiroki Okamoto, Tokushima, JP;

Hiroaki Tamemoto, Anan, JP;

Junya Narita, Yoshinogawa, JP;

Assignee:

NICHIA CORPORATION, Anan-shi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/00 (2006.01); H01L 33/00 (2010.01); H01L 21/78 (2006.01); H01L 21/304 (2006.01); H01L 21/683 (2006.01); H01L 29/04 (2006.01);
U.S. Cl.
CPC ...
H01L 33/0095 (2013.01); H01L 21/304 (2013.01); H01L 21/6835 (2013.01); H01L 21/78 (2013.01); H01L 29/04 (2013.01); H01L 2221/68327 (2013.01);
Abstract

A method for manufacturing a semiconductor element is provided. The method includes providing a semiconductor wafer including a substrate and a semiconductor structure on the substrate, forming a cleavage starting portion in the semiconductor wafer, and dividing the semiconductor wafer into a plurality of semiconductor elements by transferring a pressing member on the semiconductor wafer in a state where the pressing member is pressed against the semiconductor wafer to separate the semiconductor wafer at the cleavage starting portion. The pressing member includes a tip portion to be pressed on the semiconductor wafer, and the tip portion has a spherical surface.


Find Patent Forward Citations

Loading…