The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 30, 2018

Filed:

Nov. 27, 2014
Applicant:

Fraunhofer-gesellschaft Zur Förderung Der Angewandten Forschung E.v., München, DE;

Inventors:

Rüdiger Quay, Freiburg, DE;

Klaus Köhler, Freiburg, DE;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 29/66 (2006.01); H01L 29/78 (2006.01); H01L 29/778 (2006.01); H01L 29/08 (2006.01); H01L 21/22 (2006.01); H01L 29/20 (2006.01);
U.S. Cl.
CPC ...
H01L 29/66522 (2013.01); H01L 21/2205 (2013.01); H01L 29/0843 (2013.01); H01L 29/66462 (2013.01); H01L 29/66636 (2013.01); H01L 29/7787 (2013.01); H01L 29/78 (2013.01); H01L 29/2003 (2013.01);
Abstract

The invention relates to a field-effect transistor and a method for its manufacturing having at least one layer, said layer comprising a III-V compound semiconductor, wherein the compound semiconductor comprises at least one element from the chemical group III being selected from any of gallium, aluminum, indium and/or boron and wherein the compound semiconductor comprises at least one element from the chemical group V being selected from nitrogen, phosphorous and/or arsenic, wherein the compound semiconductor comprises at least nitrogen, wherein the field-effect transistor comprises at least any of a source electrode and/or a drain electrode, said source electrode and/or drain electrode comprising at least one doped region extending from the surface into the at least one layer, wherein the depth of penetration of said doped region is selected from approximately 10 nm to approximately 200 nm.


Find Patent Forward Citations

Loading…