The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 30, 2018

Filed:

Sep. 15, 2017
Applicant:

Renesas Electronics Corporation, Koutou-ku, Tokyo, JP;

Inventor:

Nao Nagata, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/74 (2006.01); H01L 31/111 (2006.01); H01L 29/06 (2006.01); H01L 29/10 (2006.01); H01L 29/423 (2006.01); H01L 29/66 (2006.01); H01L 29/739 (2006.01); H01L 29/40 (2006.01); H01L 29/08 (2006.01);
U.S. Cl.
CPC ...
H01L 29/0696 (2013.01); H01L 29/0619 (2013.01); H01L 29/083 (2013.01); H01L 29/1095 (2013.01); H01L 29/407 (2013.01); H01L 29/4236 (2013.01); H01L 29/6634 (2013.01); H01L 29/66333 (2013.01); H01L 29/66348 (2013.01); H01L 29/7396 (2013.01); H01L 29/7397 (2013.01); H01L 29/4238 (2013.01);
Abstract

An improvement is achieved in the IE effect of a semiconductor device including an IGBT having an active cell region with an EGE structure. Each of a plurality of hybrid cell regions extending in a Y-axis direction has first, second, and third trench electrodes extending in the Y-axis direction, a p-type body region, and contact trenches provided between the first and second trench electrodes and between the first and third trench electrodes to extend in the Y-axis direction and reach middle points in the p-type body region. Each of the hybrid cell regions further has a plurality of n-type emitter regions formed in an upper surface of a semiconductor substrate located between the contact trenches and the first trench electrode to be shallower than the contact trenches and spaced apart at regular intervals in the Y-direction in plan view. The n-type emitter regions are arranged in a staggered configuration in plan view.


Find Patent Forward Citations

Loading…