The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 30, 2018

Filed:

Aug. 20, 2013
Applicant:

Applied Materials, Inc., Santa Clara, CA (US);

Inventor:

Mariusch Gregor, Gilroy, CA (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G05D 7/06 (2006.01);
U.S. Cl.
CPC ...
G05D 7/0664 (2013.01);
Abstract

A processing device determines a plurality of initial flow setpoint commands, each of the plurality of setpoint commands corresponding to one of a plurality of valves. The processing device sends each of the plurality of initial setpoint commands to a corresponding one of the plurality of valves. The processing device receives feedback from each of the plurality of valves and determines a plurality of updated flow setpoint commands, each of which corresponds to one of the plurality of valves based on the corresponding feedback from each of the plurality of valves.


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Gregor, Mariusch. (2018). Method and system for controlling a flow ratio controller using feedback (U.S. Patent No. 10114389). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/10114389

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