The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 30, 2018

Filed:

Apr. 17, 2015
Applicant:

Horiba Jobin Yvon Sas, Longjumeau, FR;

Inventors:

Emmanuel Fretel, Croix, FR;

Damien Andrezejeusky, Villeneuve d'Ascq, FR;

Rene Boidin, Beuvry la Foret, FR;

Philippe De Bettignies, Lambersart, FR;

Assignee:

HORIBA JOBIN YVON SAS, Longjumeau, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 21/00 (2006.01); G01J 3/06 (2006.01); G01J 3/44 (2006.01); G01N 21/65 (2006.01); G02B 26/10 (2006.01);
U.S. Cl.
CPC ...
G02B 21/0048 (2013.01); G01J 3/06 (2013.01); G01J 3/44 (2013.01); G01N 21/65 (2013.01); G02B 21/0032 (2013.01); G02B 21/0076 (2013.01); G02B 26/101 (2013.01); G02B 26/105 (2013.01); G01N 2021/656 (2013.01);
Abstract

An optical beam scanning microscopy apparatus includes a light source adapted to emit an optical beam () and a microscope objective () adapted for focusing the optical beam () in an object plane (). The microscopy apparatus includes first and second reflecting optical elements (M-X, M-X) disposed in series on the optical path of the optical beam () between the light source and the microscope objective (), first elements of angular tilting () adapted for tilting the first reflecting optical elements (M-X, M-XY) according to a first predetermined rotation angle (RX), and second elements of angular tilting () adapted for tilting the second reflecting optical elements (M-X, M-XY) according to a second rotation angle (RX), in such a way as to angularly tilt the axis () of the optical beam () by pivoting about the center (O) of the pupil of the microscope objective ().


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