Method and device for non-contact detection of thin medium

Abstract

A method and device for non-contact detection of a thin medium () is disclosed. The device comprises a light source (), an optical splitter (), a reference plane (), a linearly arrayed photoelectric detector (), a signal processing module () and the thin medium (). The method involves the following steps: acquiring time for targeted light which is emitted by the light source () and reflected by the thin medium () to the linearly arrayed photoelectric detector (), and acquiring time for reference light which is emitted by the light source () and reflected by the reference plane () to the linearly arrayed photoelectric detector (); according to the acquired time that the targeted light and the reference light arrive at the linearly arrayed photoelectric detector (), computing a first optical path and a second optical path corresponding to the targeted light and the reference light respectively, and acquiring quantity of bright fringes and dark fringes of interference fringes according to a predetermined computing manner by the signal processing module (); conducting difference comparison between the quantity of the bright fringes and dark fringes of the interference fringes and the quantity of the bright fringes and dark fringes of standard interference fringes according to the predetermined manner, and if the value of the comparison result is larger than the predetermined threshold value, determining that the foreign matters are positioned on the thin medium (). The detection method and device solves the technical problems that precision is low and measuring wavelength is long caused by an existing mechanical thickness measuring device, an infrared detector and an ultrasonic detector used to detect the foreign substance on the surface of the thin medium.