The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2018
Filed:
Nov. 29, 2017
Applicant:
Commissariat a L'energie Atomique ET Aux Energies Alternatives, Paris, FR;
Inventors:
Vincent Agache, Monestier de Clermont, FR;
Francois Baleras, Saint Georges de Commiers, FR;
Assignee:
Primary Examiner:
Int. Cl.
CPC ...
B81C 1/00 (2006.01); B81B 3/00 (2006.01);
U.S. Cl.
CPC ...
B81C 1/00476 (2013.01); B81C 1/00944 (2013.01); B81C 1/00952 (2013.01); B81B 3/0021 (2013.01); B81B 2201/0214 (2013.01); B81B 2201/0264 (2013.01); B81B 2203/0118 (2013.01); B81C 2201/0109 (2013.01); B81C 2201/019 (2013.01); B81C 2201/0132 (2013.01); B81C 2201/0176 (2013.01); B81C 2201/0178 (2013.01); B81C 2201/0181 (2013.01); B81C 2201/053 (2013.01);
Abstract
The invention is a process for producing an electromechanical device including a movable portion that is able to deform with respect to a fixed portion. The process implements steps based on fabrication microtechnologies, applied to a substrate including an upper layer, an intermediate layer and a lower layer. These steps are: