The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 30, 2018
Filed:
Mar. 30, 2012
Bruce Baxter, San Mateo, CA (US);
Dennis Mullins, Sunnyvale, CA (US);
Bruce Baxter, San Mateo, CA (US);
Dennis Mullins, Sunnyvale, CA (US);
View, Inc., Milpitas, CA (US);
Abstract
This disclosure provides apparatus and methods for scribing a substrate. In one aspect, an apparatus includes optics for focusing a scribe beam onto a substrate and a beam focus adjustment mechanism for adjusting the optics. A triangulation-based distance sensor determines a distance between the triangulation-based distance sensor and the substrate, with the triangulation-based distance sensor being positioned at a location offset from the scribe beam. Reflecting elements are positioned to reflect an incident beam from the triangulation-based distance sensor's source to the substrate and then back to the triangulation-based distance sensor's detector. The beam focus adjustment mechanism adjusts the optics based on the distance between the triangulation-based distance sensor and the substrate so that the scribe beam is focused at a desired position on the substrate.